Additional Features:

• 4-quadrant source and measurement capabilities in the range of 0.1 fA - 1 A / 0.5 µV - 200 V for accurate current-voltage (IV) characterization
• Spot, sweep, pulse and sampling measurement capabilities for various measurements
• Minimum sampling measurement interval 100 μs and minimum pulse width 500 μs
• Quasi-Static Capacitance-Voltage (QS-CV) measurement with leak current compensation

The Agilent B1510A Source/Measure Units (SMUs) are the key measurement modules of B1500A Semiconductor Device Parameter Analyzer. The SMUs integrate voltage/current source and measurement capabilities into a module, and it enables accurate DC current-voltage (IV) measurement with down to fA / µV resolution. The low current measurement performance can be expanded down to sub-fA level by the optional ASU (Atto sense switch unit) if you need more measurement performance.